Uniformity of Large Area Diamond Films

HUANG Tianbin; LIU Jingming; TANG Weizhong; ZHONG Guofang; JIANG Zheng; LU Fanxiu

doi:10.13374/j.issn1001-053x.2000.05.019

Volume 22 Issue 5

Aug. 2021

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Article Navigation > Chinese Journal of Engineering > 2000 > 22(5): 467-469

HUANG Tianbin, LIU Jingming, TANG Weizhong, ZHONG Guofang, JIANG Zheng, LU Fanxiu. Uniformity of Large Area Diamond Films[J]. Chinese Journal of Engineering, 2000, 22(5): 467-469. doi: 10.13374/j.issn1001-053x.2000.05.019

Citation:

HUANG Tianbin, LIU Jingming, TANG Weizhong, ZHONG Guofang, JIANG Zheng, LU Fanxiu. Uniformity of Large Area Diamond Films[J]. Chinese Journal of Engineering, 2000, 22(5): 467-469. doi: 10.13374/j.issn1001-053x.2000.05.019

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Uniformity of Large Area Diamond Films

doi: 10.13374/j.issn1001-053x.2000.05.019

Material Science and Engineering School, UST Beijing, Beijing 100083, China

Received Date: 2000-03-18
Available Online: 2021-08-27

Abstract

Abstract

The uniformity of large area diamond filrns in deposition process and quality of diamond films is researched. The results show tha the DC arc used for deposition of diamond films is uniform. Diaxnond films are uniform in the process of nucleation and the growh. The quslity of large area diamond films is uniform.
- large area,
- diamond films,
- uniformity