Defects in CVD Diamond Films

ZHANG Hengda; LIU Jingming; SONG Jianhua; LU: Fanxiu; TANG Weizhong

doi:10.13374/j.issn1001-053x.2002.04.011

Volume 24 Issue 4

Aug. 2021

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ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

Citation:

ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

Citation:

ZHANG Hengda, LIU Jingming, SONG Jianhua, LU: Fanxiu, TANG Weizhong. Defects in CVD Diamond Films[J]. Chinese Journal of Engineering, 2002, 24(4): 426-428. doi: 10.13374/j.issn1001-053x.2002.04.011

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Defects in CVD Diamond Films

doi: 10.13374/j.issn1001-053x.2002.04.011

Material Science and Engineering School, UST Beijing, Beijing 100083, China

Received Date: 2001-03-22
Available Online: 2021-08-26

Abstract

Abstract

The defects in large area diamond films prepared by DC arc plasma jet CVD method are researched. The defects in diamond films are investigated, including the surface, bulk, boundry defects and the macro-cracks and micro-cracks caused by internal stresses. The results show that the growth parameters often led to defects in diamond films.
- diamond films,
- defects,
- formation mechanism,