Abstract: The oxygen self-diffusion paramaters in strontium titanate were assessed. The results indicated that:(1) Oxygen diffusion occurs through a vacancy mechanism in strontium titanate crystals. The ranking of the ions based on the magnitude of diffusion coefficients is oxygen strontium and titanium ion. (2) In the temperature range from 1098 to 1623 K, under an oxygen partial pressure in the range from 0.2×10⁴ to 7.6 ×10⁴ Pa, the temperature dependence of the oxygen diffusion coefficient in strontium titanate is obtained. The diffusivity of the oxygen diffusion in strontium titanate is insensitive to the variation of oxygen panal pressure and the dislocation density.