A Instrument on Surface Roughness Measurement with Laser Scanning

Gong Yuliang

doi:10.13374/j.issn1001-053x.1990.04.029

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Gong Yuliang. A Instrument on Surface Roughness Measurement with Laser Scanning[J]. Chinese Journal of Engineering, 1990, 12(4): 375-381. doi: 10.13374/j.issn1001-053x.1990.04.029

Citation:

Gong Yuliang. A Instrument on Surface Roughness Measurement with Laser Scanning[J]. Chinese Journal of Engineering, 1990, 12(4): 375-381. doi: 10.13374/j.issn1001-053x.1990.04.029

Gong Yuliang. A Instrument on Surface Roughness Measurement with Laser Scanning[J]. Chinese Journal of Engineering, 1990, 12(4): 375-381. doi: 10.13374/j.issn1001-053x.1990.04.029

Citation:

Gong Yuliang. A Instrument on Surface Roughness Measurement with Laser Scanning[J]. Chinese Journal of Engineering, 1990, 12(4): 375-381. doi: 10.13374/j.issn1001-053x.1990.04.029

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A Instrument on Surface Roughness Measurement with Laser Scanning

doi: 10.13374/j.issn1001-053x.1990.04.029

Gong Yuliang

Department of Physics

Received Date: 1989-02-22
Available Online: 2021-11-15

Abstract

Abstract

By employing the principle of laser reflecting scattering from the surface of the work piece and the laser scanning technique allied with compu-tered data collection, A/D transition and calibration curve fitting, the instrument can measure the surface roughness automatically. The resolution and repro-ducibility of the roughness measurement are 0.001μm and 0.006μm respectively.
- laser,
- scanning,
- roughness,
- measurement