Texture Analysis of CVD Diamond Thin Films

MAO Weimin; CHEN Nan

doi:10.13374/j.issn1001-053x.2000.03.019

Volume 22 Issue 3

Aug. 2021

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Article Navigation > Chinese Journal of Engineering > 2000 > 22(3): 259-261

MAO Weimin, CHEN Nan. Texture Analysis of CVD Diamond Thin Films[J]. Chinese Journal of Engineering, 2000, 22(3): 259-261. doi: 10.13374/j.issn1001-053x.2000.03.019

Citation:

MAO Weimin, CHEN Nan. Texture Analysis of CVD Diamond Thin Films[J]. Chinese Journal of Engineering, 2000, 22(3): 259-261. doi: 10.13374/j.issn1001-053x.2000.03.019

MAO Weimin, CHEN Nan. Texture Analysis of CVD Diamond Thin Films[J]. Chinese Journal of Engineering, 2000, 22(3): 259-261. doi: 10.13374/j.issn1001-053x.2000.03.019

Citation:

MAO Weimin, CHEN Nan. Texture Analysis of CVD Diamond Thin Films[J]. Chinese Journal of Engineering, 2000, 22(3): 259-261. doi: 10.13374/j.issn1001-053x.2000.03.019

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Texture Analysis of CVD Diamond Thin Films

doi: 10.13374/j.issn1001-053x.2000.03.019

MAO Weimin¹,
CHEN Nan^1,2

1. Materials Science and Engineering School, UST Beijing Beiing 100083, China;
2. Department of Materials Science and Engineering, University of Petroleum, Beijing 102200, China

Received Date: 2000-04-10
Available Online: 2021-08-27

Abstract

Abstract

Different textures of CVD diamond thin films are analyzed using the methods of pole figure and orientation distribution function. It is shown that the higher multiplicity leads to the higher appearance possibility of {110} fiber texture. The formation mechanism of {221} fiber texture by means of twinning effect is discussed. The importance of the systematic investigation on the relatonship between tetures and properties is emphasized, and the advanced methods for texture analysis are recommended.
- diamond thin film,
- the texture,
- CVD,
- texture formation